MAROPTO FI 1040 Z FIZEAU INTERFEROMETER

Full featured 40 mm Fizeau interferometer for flat or spherical surfaces
The MarOpto FI 1040 Z is a full-featured interferometer that can provide non-contact measurements of flat or spherical surfaces and transmitted wavefront of optical components and assemblies. The MarOpto FI 1040 Z is therefore ideal for measuring optical components such as flats, prisms, lenses or precision metal parts such as bearings, sealing surfaces and polished ceramics. Measurements can be made using simple basic visual fringe inspection, IntelliPhase static spatial carrier analysis, or phase-modulated interferogram analysis. The MarOpto FI 1040 Z offers flexibility and unprecedented performance to handle today’s industrial applications.
  • 6x zoom for workpieces as small as 1.5 mm in diameter
  • 3 modes of interferogram analysis: Phase shifting, IntelliPhase – static spatial carrier analysis, or fringe tracing (automated or manual)
  • Small size allows easy integration into OEM systems
  • Compact, rugged design
  • Transmission spheres from F / 0.7 to F / 6.0

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MAROPTO FI 1100 Z FIZEAU INTERFEROMETER

High accuracy measurement capability with unsurpassed flexibility and versatility
The MarOpto FI 1100 Z provides non-contact measurements of flat or spherical surfaces along with transmitted wavefront measurements of optical components and assemblies. Measurements may be made using basic visual fringe inspection, static fringe analysis, or phase-modulated interferogram analysis. The well-established IntelliWave™ software offers superior measurement and analysis capability. The MarOpto FI 1100 Z provides the versatility and reliability to handle today’s advanced applications at unrivalled value for money.

  • Total USB connectivity option (laptop or desktop) with 1k x 1k true spatial resolution
  • Excellent versatility, stability and repeatability
  • 1x to 6x zoom, focus and attenuation controls
  • Vibration-insensitivity can be accomplished via Mahr’s IntelliPhase™ static spatial carrier acquisition and analysis software
  • Compact, lightweight and rugged design
  • Compatible with all industry standard 4″ (100mm) reference optics and accessories.
  • High-accuracy measurements at an affordable price
  • Configurations include horizontal, vertical look up and vertical look down. Optional workstations for flats and for radius of curvature measurements.

Application

  • Measurement of flat, concave or convex surfaces
  • Prism, corner cube, wedge angle and homogeneity measurements
  • Measurement of machined, ceramic, and wafer surfaces
  • Wavefront analysis of optical systems & components
  • Integration into OEM systems

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MAROPTO FI 2100 AS FIZEAU INTERFEROMETER

Fizeau interferometer with CGR™ technology for measuring aspheric surfaces
The MarOpto FI 2100 AS is a highly technologically advanced interferometer, making it ideal for quality assurance in asphere production. It can perform non-contact measurements of aspheric, spherical and flat surfaces within seconds. With a fully automated measuring system MarOpto FI 2100 AS is the new standard in aspheric metrology. The MarOpto FI 2100 AS operates on the well-established IntelliWave™ software platform. It provides an intuitive user interface, ease of use, and the flexibility to handle multiple surface metrology applications. MarOpto FI 2100 AS also incorporates an interferometric analysis technique called Sub-Nyquist Sampling (SNS). SNS overcomes the limitations of measuring large wavefront slopes. SNS is used in conjunction with traditional phase-shifting (PSI) and therefore the precision inherent to PSI is maintained. Capable of analyzing more than five fringes per camera pixel, Mahr’s technology allows for a significant increase in the range of slope measurements, or amount of aspheric departure, that can be measured by the interferometer. This is all accomplished with no increase in the amount of required data and no need for special hardware such as null lenses or CGHs.
  • Capable of measuring aspheres.
  • No null lenses, CGHs, axial scanning, or stitching required
  • Options for fully or semi-automated workstations
  • < 800 µm of aspheric departure
  • Highly flexible and excellent value for money

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MAROPTO FI 2100 PS FIZEAU INTERFEROMETER

High-Accuracy Measurement Capabilities with Unsurpassed Instrument ITF

The MarOpto FI 2100 PS interferometer provides non-contact measurements of flat or spherical surfaces along with transmitted wavefront measurements of optical components and assemblies. With its diffraction-limited optical design, high resolution camera, superb ITF and dynamic PMR, the MarOpto FI 2100 PS provides unsurpassed measurement accuracies in the low and mid frequency range, regardless of environment conditions. The MarOpto FI 2100 PS, when integrated with Mahr’s IntelliWave™ software platform, is guaranteed to provide the end user with superior metrology capability.

  • Diffraction-limited optical design
  • 2k x 2k spatial resolution
  • Superb ITF guarantees unsurpassed measurement accuracy for low and mid-spatial frequency content
  • Dynamic PMR for environments subject to vibration
  • Compatible with all industry standard 4″ (100mm) reference optics and accessories.
  • Configurations include horizontal, vertical look up and vertical look down. Optional workstations for flats and for radius of curvature measurements

Applications

  • Measurement of flat, concave or convex surfaces
  • Prism, corner cube, wedge angle and homogeneity measurements
  • Measurement of optical, machined, ceramic, and wafer surfaces
  • Wavefront analysis of optical systems & components
  • Production and shop floor

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MAROPTO FI 3100 VB FIZEAU INTERFEROMETER

Simultaneous phase-shifting for vibration-insensitive measurements in production
The MarOpto FI 3100 VB simultaneous phase-shifting Fizeau interferometer is a real-time, high-speed, truly vibration-insensitive metrology instrument with shutter speeds as fast as 10 µs. Ideally suited for shop/production floors, the MarOpto FI 3100 VB offers unsurpassed measurement accuracy, stability and repeatability. Mahr’s new SPARC technology ensures measurement errors of less than λ / 50 with no vibration isolation.

  • Absolute vibration insensitivity
  • Common path Fizeau geometry
  • Can measure surfaces with 0.1% to 100% reflectivity
  • 10 µs exposure times
  • 1k x 1k resolution
  • Compatible with all industry standard 4″ (100mm) reference optics and accessories.

Applications

  • Measurements of flat, concave and convex surfaces of any size
  • Measurements over long distances, including in vacuum chambers
  • In-situ measurements of optical, machined and wafer surfaces
  • Dynamic measurements for thermodynamic events, moving objects, etc.
  • Characterization & removal of birefringence effects

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MAROPTO TWI 60 TILTED WAVE INTERFEROMETER

Tilted Wave Interferometer for Fast and Flexible Measurement and Analysis of Aspheric Lenses
The Tilted Wave Interferometer (MarOpto TWI 60) constitutes a novel, promising and highly flexible interferometer to measure aspheres quickly and with high precision.
The figure above shows the measured surface error of the A5 demonstrator asphere (clear aperture 50 mm, best-fit radius 40.8 mm, best-fit deviation 600 μm, gradient deviation 8°).
The lateral resolution of about 30 μm can be achieved. Within a data acquisition time of approx. 30 seconds an entire asphere surface can be measured with high lateral resolution and low measurement uncertainty. Most importantly, no CGH or stitching is necessary.
  • Flexible interferometric measurement of aspheric lenses without CGH
  • Measurement without any need for lateral or axial stitching
  • Short data acquisition time approx. 30 s
  • Test beam diameter 100 mm
  • Allowed aspheric departure from best-fit sphere up to approx. 1.5 mm

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MAROPTO INTELLIWAVE SOFTWARE


Interferometric Analysis Software – IntelliWave
High performance interferometric analysis software designed to adapt to virtually any fringe-based interferometer.
IntelliWave allows for the characterization of spherical optics, aspheric optics, machined parts, ceramics, semiconductor wafers, and analysis of optical wavefronts. Applications include measuring, flatness, irregularity, roughness, parallelism, curvature, stress, and strain.
In addition to running on MarOpto FI interferometers, IntelliWave runs on most commercial or custom interferometer. A feature list and application examples are available in the IntelliWave flyer that can be downloaded on the right hand side.

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MARSURF LD 130 / 260 ASPHERIC 2D UND 3D ASPHERE MEASURING STATION

MarSurf LD 130 / LD 260. A step into a new dimension
MarSurf LD 130 / 260 Aspheric is a high-precision 2D / 3D surface measuring station for characterizing contour and roughness on optical components.

Checks the topography in the first machining operations

  • Early detection of deviations, thus avoiding costly reworking.
  • Differential profile output in machine-readable format for controlling the machine tool.

Increased flexibility

  • Different types of rotationally symmetrical aspheres can be measured with one measuring system. No additional investment required.
  • Large measuring range up to 260 mm (up to 400 mm with the stitching option)
  • Maximum measuring speed and dynamics (up to 10 mm/s for large lenses / up to 0.02 mm/s for microlenses)
  • Fully positionable stylus tip.

Bionic-style LP D probe arm

  • Improved probe system dynamics thanks to increased rigidity and attenuation as well as a lower moment of inertia:
    – optimized overall design of the probe system
    – innovative choice of materials
  • Probe arm with integrated chip for:
    – detecting and identifying the probe arm,
    – checking that the probe arm is inserted correctly,
    – providing information from probe arm.

Your results will be right

  • The high-precision MarSurf LD 130 / 260 is the basis for the accurate measurement of your workpieces. The vertical resolution of 0.8 nm and form deviations of < 100 nm guarantee the exact reproduction of your asphere.
  • Probe arm change with no need to recalibrate.
  • Lenses with steep sides can be measured.

 

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MARFORM MFU 200 ASPHERIC 3D PRECISION 3D MEASURING STATION

Mahr developed the MarForm MFU 200 Aspheric 3D to enable optical components to be tested in 2D / 3D quickly and close to the production area. MarForm measuring machines have been recognized for decades for their accuracy and stability.
With the MarForm MFU 200 Aspheric 3D this experience has now been made available to the optical industry.

Accuracy
The MarForm MFU 200 Aspheric 3D is a precision measuring instrument which with its very low measurement uncertainty is ideally suited to your process optimization requirements.

Measuring principle
The MarForm MFU 200 Aspheric 3D measures the topography of optical components. Of course, a quick 2D measurement can also be recorded with a profile across the zenith of the lens. For 3D measurements two linear profiles offset by 90° are first measured across the zenith of the lens in a single sequence. Then multiple concentric polar profiles are recorded by rotating the C-axis. These measuring points are used to generate a topography. Interrupted surfaces can be measured with the fully positionable probe arm.
Using the measuring station in a vibration-cushioned cabinet keeps external interference such as vibration and dirt away from the measuring objects.

Measuring procedure
Before starting the measurement, choose the nominal form type and set the parameters for the expected reference lens. In the next step the measuring data is recorded and compared with the nominal data for the lens.
The RMS value, PV value and slope error are shown as parameters.
In the software the individual parameters for the aspheres, such as the radius of curvature R0, conical constant k and the aspheric coefficients Ai, can be adjusted to the measuring results when adjusting the nominal asphere to the fit asphere.
The differential topography between the measured values and the nominal lens is displayed as a color-coded line chart. The 2D profiles and the differential topography can then be exported in known formats for correction for the machine tool.
In addition to measuring spheres and aspheres as described above, other rotationally symmetrical objects can also be measured and evaluated using the nominal form as a conical profile or Sagitta description of a 3D scatter plot.

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MILLIMAR LCT 100

The Millimar LCT 100 measuring station is a user-friendly measuring instrument which measures the center thickness of optical components.
Advantages:

  • Precise measurements by two inductive probes
  • Easy positioning of the lens thanks to pneumatic probe lift with foot pedal
  • Automatic centering of the lens thanks to self-centering clamp
  • Fast master and lens measurements
  • Direct calculation of actual value or deviation
  • Visual display when tolerances are exceeded (green, yellow, red)
  • Measurement of concave and convex lenses using interchangeable measuring anvils (spherical, flat)
  • Flexible lens supports (cup point or pins)

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MarSurf CWM 100

It is precision, computer-controlled optical measuring instrument with sub-nanometer resolution. A combined 3D measuring system comprising a confocal microscope and white light interferometer

Advantages

  • Special microscope technology dedicated to the reproduction of tiny surface features up to the physical limit
  • Surface scanning in video real time technology for fast and reliable results
  • Large selection of highest quality objectives
  • Measurement of topography, height, shape and position of elements and structures
  • Robust, maintenance free, built for long service life

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